TESTING METHOD AND TESTER FOR SEMICONDUCOR INTEGRATED CIRCUIT DEVICE COMPRISING HIGH-SPEED INPUT/OUTPUT ELEMENT

摘要

A testing method and a tester for a semiconductor integrated circuit device comprising a high−speed input/output element, which enable the test of a high−speed I/O element rapidly exceeding 1GHz with a simple board configuration without any alterations the test system for every I/O specification. A load board (3) provided with a loopback path (4) for connecting the external output terminal and external input terminal of a semiconductor integrated circuit device (1) comprising a high−speed input/output element (2) with a transmission line is loaded with the semiconductor integrated circuit device (1). A testing means (5) provided in the semiconductor integrate circuit device (1) and the loopback path (4) are utilized to test the action of the high−speed input/output element (2) in the semiconductor integrated circuit device (1).