发明名称 |
X-ray topographic system |
摘要 |
An X-ray topographic system comprises an X-ray generator producing a beam of X-rays impinging on a limited area of a sample such as a silicon wafer. A solid state detector is positioned to intercept the beam after transmission through or reflection from the sample. The detector has an array of pixels matching the beam area to produce a digital image of said limited area. Relative stepping motion between the X-ray generator and the sample produces a series of digital images which are combined together. In optional embodiments, an X-ray optic is interposed to produce a parallel beam to avoid image doubling, or the effect of image doubling is removed by software.
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申请公布号 |
US2003108152(A1) |
申请公布日期 |
2003.06.12 |
申请号 |
US20010004785 |
申请日期 |
2001.12.07 |
申请人 |
BOWEN DAVID KEITH;WORMINGTON MATTHEW;PINA LADISLAV;FEICHTINGER PETRA |
发明人 |
BOWEN DAVID KEITH;WORMINGTON MATTHEW;PINA LADISLAV;FEICHTINGER PETRA |
分类号 |
G01N23/04;G01N23/203;G01N23/207;H01L21/66;(IPC1-7):G01N23/207 |
主分类号 |
G01N23/04 |
代理机构 |
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主权项 |
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地址 |
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