发明名称 Stress shield for microelectronic dice
摘要 A stress shield made of a material having a CTE similar to that of the material used in the fabrication of a microelectronic die, including but not limited silicon, molybdenum, and aluminum nitride, which abuts at least one corner and/or edge of the microelectronic die. When the stress shield is positioned to abut the microelectronic die corners and/or edges, the mechanical stresses on the microelectronic die are greatly reduced or substantially eliminated.
申请公布号 US2003107113(A1) 申请公布日期 2003.06.12
申请号 US20030349812 申请日期 2003.01.22
申请人 MA QING 发明人 MA QING
分类号 H01L21/56;H01L23/16;H01L23/31;(IPC1-7):H01L23/495 主分类号 H01L21/56
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