发明名称 |
Wafer guide and cleaning apparatus having the same |
摘要 |
A wafer guide for supporting at least one semiconductor wafer during a cleaning process, includes side panels having a plurality of side fixing grooves on an upper surface thereof for stabilizing the at least one semiconductor wafer and for maintaining a sufficient distance between a surface of the at least one semiconductor wafer and an adjacent surface; a center panel having a plurality of center fixing grooves on the upper surface thereof for supporting the at least one semiconductor wafer, each of the plurality of center fixing grooves having inner walls, wherein a contact line is formed on each of the inner walls of the center fixing grooves, and wherein the center panel is positioned between the pair of side panels; and a pair of fixing plates, one of the pair of fixing plates being fixedly attached at each end of the center panel and the pair of side panels.
|
申请公布号 |
US2003106575(A1) |
申请公布日期 |
2003.06.12 |
申请号 |
US20020294684 |
申请日期 |
2002.11.15 |
申请人 |
MOON BONG-HO;KO YONG-SUN;LEE WON-JUN;JUN YONG-MYUNG;HWANG IN-SEAK |
发明人 |
MOON BONG-HO;KO YONG-SUN;LEE WON-JUN;JUN YONG-MYUNG;HWANG IN-SEAK |
分类号 |
H01L21/306;B08B3/04;H01L21/00;H01L21/304;H01L21/673;(IPC1-7):B08B3/00 |
主分类号 |
H01L21/306 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|