| 摘要 |
<p>A probe device (20) having a contact load monitoring device (10). This contact load monitoring device measures the displacement of a loading table caused by a contact load exerted on the mounting table from a probe in an overdrive by means of a displacement sensor (11) disposed in the space below the mounting table as a sinkage quantity. This sinkage quantity is collated with a correlation table to determine the contact load. If the contact load is less than the design contact load, the mounting table is further overdriven.</p> |
