| 摘要 |
There is provided an excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has a low power consumption. Each electromagnet (stator) 7-1 of a magnetic bearing 7 for supporting a rotary shaft 4 of a circulation fan 3 includes excitation coils, each of which is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is nonmagnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles comprising magnetic bodies. Alternatively, an arrangement may be made, such that coil wires 108b of a radial magnetic bearing 108 are isolated from a corrosive atmosphere by means of a separation wall 124 while projecting portions of cores 108b extend through the separation wall 124 and are exposed toward a magnetic bearing rotor 108f.
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