发明名称 |
Substrate body coated with multiple layers and method for the production thereof |
摘要 |
The invention relates to a method for producing a wearing protection layer according to a CVD method. Said protection layer consists of a plurality of thin individual layers having a layer thickness of 1 to 100 nm respectively. The respective individual layers are successively deposited on a substrate body. The invention also relates to a correspondingly coated substrate body. According to the invention, the CVD method which is activated by means of a glow discharge plasma is carried out under a pressure of 50 Pa to 1,000 Pa and at a temperature of not more than 750 ° C. in such a way that the voltage for producing the glow discharge is switched off while the gas composition is changed for preparing the deposition of the next individual layer or that a gas or a gas mixture of argon, hydrogen and/or nitrogen is led into the coating container at an essentially constantly high temperature and the glow discharge is maintained by applying a voltage of 200 V to 1,000 V over a period that is shorter than the period of coating of the last individual layer.
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申请公布号 |
US2003108752(A1) |
申请公布日期 |
2003.06.12 |
申请号 |
US20020257086 |
申请日期 |
2002.10.07 |
申请人 |
KOENIG UDO;TABERSKY RALF;VAN DEN BERG HENDRIKUS |
发明人 |
KOENIG UDO;TABERSKY RALF;VAN DEN BERG HENDRIKUS |
分类号 |
C23C16/44;C23C16/455;C23C16/515;(IPC1-7):C23C16/00;B05D1/36;B32B15/04 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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