| 发明名称 |
TRÄGERPLATTE MIT LOKALER DRUCKSTEUERUNG FÜR EINE CHEMISCH-MECHANISCHE POLIERVORRICHTUNG |
| 摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane, the lower surface of which provides a substrate-receiving surface. The carrier head may include a projection which contacts an upper surface of the flexible membrane to apply an increased load to a potentially underpolished region of a substrate. Fluid jets may be used for the same purpose. |
| 申请公布号 |
DE69808774(T2) |
申请公布日期 |
2003.06.12 |
| 申请号 |
DE1998608774T |
申请日期 |
1998.08.05 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ZUNIGA, M.;CHEN, CHIH;BIRANG, MANOOCHER;WIJEKOON, KAPILA;KO, SEN-HOU |
| 分类号 |
B24B37/00;B24B37/04;B24B37/30;B24B37/32;B24B41/06;B24B49/16;H01L21/304;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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