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经营范围
发明名称
Particle beam apparatus with energy filter
摘要
申请公布号
EP0911860(B1)
申请公布日期
2003.06.11
申请号
EP19980117973
申请日期
1998.09.22
申请人
LEO ELEKTRONENMIKROSKOPIE GMBH
发明人
WEIMER, EUGEN,DR.;BIHR, JOHANNES
分类号
G01Q30/20;H01J37/05;H01J49/44;(IPC1-7):H01J37/05
主分类号
G01Q30/20
代理机构
代理人
主权项
地址
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