| 摘要 |
PURPOSE: A high precision temperature/humidity controller is provided to simplify configuration of the controller, while allowing for ease of control and achieving improved accuracy of control. CONSTITUTION: A high precision temperature/humidity controller comprises a refrigerating cycle including a compressor, a condenser and an expansion valve. The first refrigerant passed through the refrigerating cycle is heat exchanged with the water serving as the second refrigerant in an evaporator(24). The flow rate of the water is controlled by a control flow meter(32). The water flows along a water supplying pipe(33), and is sprayed over a heat/mass transfer unit(43) through a spray unit(41). The wet air introduced through an air inlet port(52) passes through the heat/mass transfer unit and contacts the water being sprayed through the spray unit. Here, the temperature and partial pressure of the water vapor of the wet air are balanced with the temperature and partial pressure of the water vapor of the water. The temperature difference between the wet air and the water causes a heat transfer, and the partial pressure difference between the wet air and the water causes a mass transfer.
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