| 摘要 |
PURPOSE: A cassette including a level gauge for manufacturing a semiconductor device is provided to be capable of easily checking and controlling the level state of the cassette. CONSTITUTION: A cassette(100) is provided with a base plate(200) for loading a carrier(600) stored with a plurality of wafers, an X-axis level control screw(300) installed at the base plate(200) for controlling the X-axis level of the base plate(200), an X-axis level gauge(320) located in the base plate(200) adjacent to one side of the X-axis level control screw(300), an Y-axis level control screw(400) installed at the base plate(200) for controlling the Y-axis level of the base plate(200), and an Y-axis level gauge(420) located in the base plate(200) adjacent to one side of the Y-axis level control screw(400).
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