METHOD FOR MANUFACTURING SPECIMEN FOR TRANSMISSION ELECTRON MICROSCOPE(TEM)

摘要

PURPOSE: A method for manufacturing a specimen for a TEM(Transmission Electron Microscope) is provided to be capable of reducing the fabrication time and preventing the contamination of the specimen by using a FIB(Focused Ion Beam) apparatus. CONSTITUTION: A mark(50) is formed on a wafer having an analysis point(52) for discriminating the analysis point(52). A protecting layer(54) is deposited on the analysis point(52). A preliminary specimen including the analysis point(52) is formed by etching the predetermined portion of the wafer. An analysis specimen(56) is formed by separating the preliminary specimen from the wafer. The analysis specimen(56) is attached on a grid(58). Preferably, the etching process for forming the preliminary specimen, is carried out by using a FIB apparatus.