发明名称 |
Catadioptric optical system and exposure apparatus equipped with the same |
摘要 |
A catadloptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the first plane surface onto a second plane surface which is substantially parallel to the first plane surface, and a catadioptric type optical system disposed in the optical path from the first plane surface to the second plane surface and including a first reflecting surface which reflects light coming from through the first plane surface and a second reflecting surface for directing the light reflected by the first reflecting surface toward the second plane surface. At least one of the first and second reflecting surfaces Is a concave reflecting surface. All of the optical elements of the catadloptric optical system are disposed on a single linear optical axis. <IMAGE>
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申请公布号 |
EP1318425(A2) |
申请公布日期 |
2003.06.11 |
申请号 |
EP20030000101 |
申请日期 |
2000.07.13 |
申请人 |
NIKON CORPORATION |
发明人 |
SUENAGA, YUTAKA;MIYASHITA, TOMOHIRO;YAMAGUCHI, KOTARO |
分类号 |
G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/08 |
主分类号 |
G02B17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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