| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus is provided to be capable of preventing the backflow of by-products by using a foreline having a filter. CONSTITUTION: A semiconductor manufacturing apparatus is provided with a reaction chamber(100), a pump(110) for exhausting process gas and by-products from the reaction chamber(100), and a foreline(120) connected between the reaction chamber(100) and the pump(110) for transmitting the process gas and by-products. The foreline(120) further includes a filter(140) installed in the foreline(120) for blocking the backflow of the by-products. Preferably, one flow from the chamber(100) to the pump(110) is passed through the filter(140) and the other flow from the pump(110) to the chamber(100) is blocked by the filter(140).
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