Apparatus for the micro-bubble analysis of a high-purity glass tube, using the scattering of laser light

摘要

Apparatus for analyzing micro-bubbles inside a high-purity glass tube by using laser light dispersion. The apparatus includes: an optical base having a sample stage in a substantially horizontal orientation; a glass tube rotatably mounted on the optical base in a substantially vertical orientation, the glass tube being rotated and translated in a vertical direction at a predetermined speed via the sample stage; a light generator disposed at one side of the glass tube for selectively irradiating a laser light onto an outer surface of the glass tube at a prefixed angle; and, a detector disposed at the other side of the glass tube for detecting the distribution and amount of micro-bubbles of the glass tube using the laser light passed through the glass tube.