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发明名称
Damascene cap layer process for integrated circuit interconnects
摘要
申请公布号
EP1276146(A3)
申请公布日期
2003.06.11
申请号
EP20020100790
申请日期
2002.07.09
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
JIANG, PING;XING, GUOQIANG
分类号
H01L21/3065;H01L21/4763;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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