发明名称 Method for dispensing reagent onto substrate
摘要 A method and apparatus for dispensing precise quantities of reagents is disclosed including a positive displacement syringe pump in series with a dispenser, such as an aerosol dispenser or solenoid valve dispenser. The pump is controlled by a stepper motor or the like to provide an incremental quantity or continuous flow of reagent to the dispenser. The pump and dispenser are operated in cooperation with one another such that the quantity and/or flow rate of liquid dispensed by the dispenser can be precisely metered substantially independently of the particular operating parameters of said dispenser to attain a desired flow rate, droplet size or mist quality, droplet frequency and/or droplet velocity.
申请公布号 US6576295(B2) 申请公布日期 2003.06.10
申请号 US19990286154 申请日期 1999.04.05
申请人 发明人
分类号 B01L3/02;G01N35/10;(IPC1-7):B05D5/00 主分类号 B01L3/02
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