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发明名称
METHOD AND APPARATUS FOR UTILIZING INTEGRATED METROLOGY DATA AS FEED-FORWARD DATA
摘要
申请公布号
AU2002324982(A1)
申请公布日期
2003.06.10
申请号
AU20020324982
申请日期
2002.09.12
申请人
ADVANCED MICRO DEVICES, INC.
发明人
THOMAS, J. SONDERMAN;ALEXANDER, J. PASADYN;CHRISTOPHER, A. BODE
分类号
H01L21/66;G06F19/00;H01L21/00;H01L21/02;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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