发明名称 |
SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To improve the workability by carrying out an appearance inspection by a camera above a cover tape. SOLUTION: Acceptance or rejection of a semiconductor device 10 can be determined with stable sensitivity by carrying out the appearance inspection of the semiconductor device 10 packed by a carrier tape 2 and the cover tape 11 by using the camera 6 for appearance inspection above the cover tape 11, and overlooking of any defective appearance can be reduced. Since the work of appearance inspection can be reduced, the workability is improved. COPYRIGHT: (C)2003,JPO
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申请公布号 |
JP2003165506(A) |
申请公布日期 |
2003.06.10 |
申请号 |
JP20010366985 |
申请日期 |
2001.11.30 |
申请人 |
HITACHI LTD;HITACHI TOKYO ELECTRONICS CO LTD |
发明人 |
INOUE HAJIME;MIMURA KATSUMI |
分类号 |
G01N21/85;B65B15/04;B65B57/10;(IPC1-7):B65B15/04 |
主分类号 |
G01N21/85 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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