发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To improve the workability by carrying out an appearance inspection by a camera above a cover tape. SOLUTION: Acceptance or rejection of a semiconductor device 10 can be determined with stable sensitivity by carrying out the appearance inspection of the semiconductor device 10 packed by a carrier tape 2 and the cover tape 11 by using the camera 6 for appearance inspection above the cover tape 11, and overlooking of any defective appearance can be reduced. Since the work of appearance inspection can be reduced, the workability is improved. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003165506(A) 申请公布日期 2003.06.10
申请号 JP20010366985 申请日期 2001.11.30
申请人 HITACHI LTD;HITACHI TOKYO ELECTRONICS CO LTD 发明人 INOUE HAJIME;MIMURA KATSUMI
分类号 G01N21/85;B65B15/04;B65B57/10;(IPC1-7):B65B15/04 主分类号 G01N21/85
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