| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for quickly taking out the ingot obtained by solidifying a melt. SOLUTION: In a chamber 2, there are provided a mold 4 to contain a silicon melt 3, a highly thermally conductive cooling plate 5 to transmit cooling when the mold 4 is placed to cool the silicon melt 3, and a surrounding part 6 formed by a heat insulating material to surround the mold 4 and the cooling plate 5. Furthermore, there are provided a cooling device 11 to take out the atmosphere within the space surrounded by the surrounding part 6 to cool to supply it toward the cooling plate 5, a temperature measuring device 12 to detect the temperature of the silicon melt 3, and a control unit 13 to control the operation of each section to constitute the crystal producing apparatus 1 including the cooling device 11 based on the measured value from the temperature measuring device 12. COPYRIGHT: (C)2003,JPO
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