| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone generating device capable of forming the ozone having a high purity efficiently in large quantity in a desired timing while suppressing generation of impurities. SOLUTION: In the construction comprising a lamp to radiate UV light and a tube to pass the gas to be ozonized in order to ozonize oxygen by photochemical reaction, the arrangement and material of the tube allow the tube to receive the UV light radiated by the lamp and the inside of the tube is separated from the electrode of the lamp. The ozone passing tube made of silica glass may be a double tube noncontactly covering the outer periphery of a generally cylindrical excimer lamp. The outer periphery of the ozone passing tube may be provided with a UV light reflecting member. COPYRIGHT: (C)2003,JPO
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