| 发明名称 |
Damascene capacitor having a recessed plate |
| 摘要 |
A damascene capacitor structure includes a recessed capacitor plate for preventing leakage and dielectric breakdown between the capacitor plates of the capacitor structure on the surface of the trenches and in the bottom corners of the trenches.
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| 申请公布号 |
US6576525(B2) |
申请公布日期 |
2003.06.10 |
| 申请号 |
US20010811965 |
申请日期 |
2001.03.19 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STAMPER ANTHONY K. |
| 分类号 |
H01L27/04;H01L21/02;H01L21/334;H01L21/768;H01L21/822;H01L27/08;(IPC1-7):H01L21/20 |
主分类号 |
H01L27/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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