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发明名称
METHOD AND APPARATUS FOR EXPOSING PHOTORESISTS USING PROGRAMMABLE MASKS
摘要
申请公布号
AU2002366162(A1)
申请公布日期
2003.06.10
申请号
AU20020366162
申请日期
2002.11.18
申请人
PIXELLIGENT TECHNOLOGIES LLC
发明人
ANDREW CASE;GREGORY, D. COOPER;ERIN FLEET
分类号
G03F7/20;(IPC1-7):G03B27/42;G03B27/54;G03B27/32
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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