发明名称 METHOD OF SYNTHESIZING A COMPOUND OF THE FORMULA Mn+1AXn, FILM OF THE COMPOUND AND ITS USE
摘要 A method of synthesizing or growing a compound having the general formula M<SUB>n+1</SUB>AX<SUB>n</SUB>( 16 ) where M is a transition metal, n is 1, 2, 3 or higher, A is an A-group element and X is carbon, nitrogen or both, which comprises the step of exposing a substrate to gaseous components and/or components vaporized from at least one solid source ( 13, 14, 15 ) whereby said components react with each other to produce the M<SUB>n+1</SUB>AX<SUB>n </SUB>( 16 ) compound.
申请公布号 AU2002365543(A1) 申请公布日期 2003.06.10
申请号 AU20020365543 申请日期 2002.12.02
申请人 ABB AB 发明人 ULF JANSSON;LARS HULTMAN;JENS BIRCH;TIMO SEPPANEN;PETER ISBERG;JENS-PETTER PALMQUIST
分类号 C23C14/06;C30B23/02 主分类号 C23C14/06
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