发明名称 |
Correction method of scanning electron microscope |
摘要 |
A method of correcting a scanning electron microscope using a detection sample for producing light of an intensity corresponding to an electron density of an electron beam irradiating a surface of the detection sample. Precise correction of the scanning electron microscope is performed on the basis of the intensity of the light generated on the detection sample.
|
申请公布号 |
US6576902(B2) |
申请公布日期 |
2003.06.10 |
申请号 |
US20000734556 |
申请日期 |
2000.12.13 |
申请人 |
OKI ELECTRIC INDUSTRY CO., LTD. |
发明人 |
KUWAHARA KAZUYUKI |
分类号 |
G21K5/00;G01N23/04;G01N23/22;G21K5/04;G21K7/00;H01J37/147;H01J37/20;H01J37/21;H01J37/26;H01J37/28;(IPC1-7):H01J37/26 |
主分类号 |
G21K5/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|