| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet head comprising a pressure chamber having a high accuracy in the depth direction and an easy-to-handle cavity plate, and its manufacturing method. SOLUTION: A cavity plate 15 forming an ink jet head 30 comprises a clad material 16 integrating a first layer 15a and a second layer 15b of different material, and a manifold plate 15c stacked vertically wherein a pressure chamber 18 is formed in the first layer 15a and interconnecting holes 34 and 35 are formed in the second layer 15b, respectively, by etching. Since the pressure chamber 18 and the interconnecting holes 34 and 35 are formed individually with etching liquids which can etch only one of the first layer 15a and the second layer 15b, respectively, a pressure chamber 18 and interconnecting holes 34 and 35 can be formed with a high accuracy in the depth direction. COPYRIGHT: (C)2003,JPO |
