发明名称 SPINDLE UNIT FOR ATTACHING ROTATING TOOL AND CUTTING DEVICE PROVIDED WITH SPINDLE UNIT
摘要 PROBLEM TO BE SOLVED: To provide a spindle unit for attaching a rotating tool and a cutting device provided with the spindle unit capable of securing support rigidity of a rotary spindle for attaching the rotating tool and preventing a rotational runout of the rotary spindle. SOLUTION: The spindle unit 53 is provided with a spindle housing 53 and the rotary spindle 54 arranged inserted through the spindle housing and provided with a tool attaching part for attaching the rotating tool in a front end part. The rotary spindle 54 is supported by a mechanical bearing in a front end part of the spindle housing 53 and it is supported by high pressure air fed between it and an air bearing member 80 arranged between it and the spindle housing 53 in a rear end part of the spindle housing 53. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003165036(A) 申请公布日期 2003.06.10
申请号 JP20010366394 申请日期 2001.11.30
申请人 DISCO ABRASIVE SYST LTD 发明人 KUBOTA SUSUMU
分类号 B23B19/02;B23Q1/00;B23Q1/26;B23Q1/38;B23Q1/40;B23Q1/70;F16C32/00;F16C32/06;H01L21/301;(IPC1-7):B23Q1/40 主分类号 B23B19/02
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