| 摘要 |
PROBLEM TO BE SOLVED: To apply coating so as to have an even film thickness on the whole surface of the coating film by removing swelling parts made in the start and finish of the coating of an organic film formed by a slit-coating method. SOLUTION: The unnecessary organic film is evaporatively removed by applying a laser on the swelling parts made in the coating start and finish of the coating of the organic film formed on a base board by the slit coating method. COPYRIGHT: (C)2003,JPO |
