发明名称 Sampling inspection managing system
摘要 In a sampling inspection managing system, for each processing step, a setting is made on a processing flow table as to whether the processing step concerned is a step for determining the sampling inspection frequency of a specific inspection step. For a processing step which is set as "being a step for determining the sampling inspection frequency", the inspection frequency of the specific inspection step is set on a sampling frequency setting table for every kind of product to be processed. Further, for the processing step, the processing number of lots is counted for every kind of product in a count table, and, on the basis of the processing number thus counted, a judgment is made as to whether each lot is a lot to be inspected in the specific inspection step. The judgment result is stored as information for the lot in a lot table. Accordingly, the inspection can be carried out at an inspection frequency suitable for every kind of product.
申请公布号 US6577972(B2) 申请公布日期 2003.06.10
申请号 US20010792052 申请日期 2001.02.26
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION 发明人 YANARU TAICHI;OKABE MASATAKA;OHTSUKA HIROFUMI
分类号 G01N37/00;G05B19/418;H01L21/02;H01L21/66;(IPC1-7):G01N37/00;G06F19/00 主分类号 G01N37/00
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