| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device safe for the operator and capable of dressing without damaging the blade, with blade positioning time for dress shortened by performing the dress at the time of detection of a blade edge by the blade detector. SOLUTION: The dicing device 10 has a blade detector 20 located near a work processing table 14 and provided with detection heads facing each other for detecting the edge of a blade 11 with the blade 11 positioned in between the facing heads, and a dressing bar 30 for dressing the blade 11. The bar 30 is so arranged that the blade 11 may be dressed while it moves in the direction of the Z axis from the position it is detected by the blade detector 20. COPYRIGHT: (C)2003,JPO |
