发明名称 Interferometer
摘要 Interferometer for measuring a phase difference between a reference beam (37) and an object beam (36') transformed by an optical element (10), comprising light source means (2), an optical device (3) and detection means (4) in a detection plane (34). The optical device (3) comprises a first light conductor (30) having a first output surface (31) that generates an object beam (36) having a spherical wave front and a second light conductor (32) having a second output surface (33) that generates a reference beam (37) having a spherical wave front, directed onto the detection plane (34), wherein the set-up of the first light conductor (30) and the optical element (10) is such that the transformed object beam (36') interferes with the reference beam (37) in the detection plane (34).
申请公布号 US6577400(B1) 申请公布日期 2003.06.10
申请号 US20010719285 申请日期 2001.03.05
申请人 STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN 发明人 KLAVER RENATUS GERARDUS
分类号 G01B9/02;G01B11/24;G01B11/245;G01B11/255;G01M11/02;G03F7/20;(IPC1-7):G01B9/02 主分类号 G01B9/02
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