METHOD AND APPARATUS FOR SUPPLYING GAS

摘要

PROBLEM TO BE SOLVED: To provide a gas supply method and an apparatus therefor capable of efficiently separating and refining a useful component gas contained in a waste gas and making the useful component gas reusable independently of the flow fluctuation and the composition fluctuation of the waste gas and capable of efficiently supplementing the useful component gas for compensating consumed amount.

SOLUTION: The gas supply method involves recovery of a waste gas discharged out of a gas use facility, separation and refining of a useful component gas contained in the waste gas and then supplying the obtained useful component gas to the gas use facility, and the separation and refining of the useful component gas is carried out after the gas supplement, which gas is of the same component as that of the useful component gas, is added to the waste gas discharged out of the gas use facility.

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