| 摘要 |
A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1x1017 molecules/cm3, reduction type defects are at most 1x1015 defects/cm3, and the relation between DELTAk163 and DELTAk190, as between before and after irradiation of ultraviolet rays, satisfies 0<DELTAk163<DELTAk190, and a process for its production.
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