| 摘要 |
PURPOSE: To provide a screening method and a screening device for integrated circuit devices capable of detecting failures in the integrated circuit devices prior to the actualization of failures and removing initial failures in a short time. CONSTITUTION: The screening method and screening device for screening initial defective units of integrated circuit devices supplies a predetermined source voltage for the integrated circuit devices, creates a test signal formed of a predetermined period, impresses it on the integrated circuit devices, observes a source current passing through the integrated circuit devices, computes the power spectral data of the source current corresponding to the test signal impressed on the integrated circuit devices, obtains the distribution ratio of the power spectral data of the source current of the plurality of integrated circuit devices including initial defective units, and judges that the integrated circuit devices with the power spectral data greater than a predetermined determination reference value are initial defective units.
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