| 摘要 |
PURPOSE: A mask stacking apparatus of a swing arm is provided to improve surface uniformity of a mask by preventing a layer from being overlapped to the mask when developing the layer in the mask. CONSTITUTION: A developer stacks a chemical material on the mask. A drive motor(20) generates power and is fixed to the inner wall surface of a chamber(1) by using a support unit(22). A connection unit is fixed to a rotation axis(24) of the drive motor. A horizontal swing arm(28) is horizontally installed in the connection unit. A vertical swing arm(32) is vertically connected to the end portion of the horizontal swing arm by using a connection member(30). A vibration nozzle(34) sprays the chemical material on the mask while swinging and is connected to the end portion of the vertical swing arm.
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