PURPOSE: A plasma coil is provided to reduce remnants on a plasma chamber window by supplying a more uniform and intense electric field while using a conductive plate located in the center space defined by a winding positioned in the innermost of a plurality of windings. CONSTITUTION: The first conductive coil(30) is prepared. The first conductive plate is connected in series to the first conductive coil. The plasma coil(28) includes the first conductive coil and the first conductive plate. The first conductive coil includes an insulation plate whose side is disposed near the first conductive coil and the first conductive plate. A part of the first conductive plate overlaps the first conductive coil. The first conductive plate is disposed between the first conductive coil and the insulation plate.
