FOUR-SOURCE BOAT ARRAY ACCOMMODATED IN VACUUM DEPOSITION EQUIPMENT

摘要

PURPOSE: A four-source boat array is provided to achieve optimum thickness uniformity of an optical conductive layer by geometrically installing four-source boats in vacuum deposition equipment. CONSTITUTION: A four-source boat array includes four-source boats accommodated in vacuum deposition equipment. The four-source boat array includes a main array consisting of three-source boats(10-1) forming a triangular shape and a sub-array having one source boat(10-2) horizontally installed at one side of the main array. The main array has a regular triangle shape. Length of each source boat(10-1) forming the regular triangle shape is about 314mm, and a diameter of each source boat(10-1) is about 60mm. A distance between a center point of the main array to each source boat(10-1) is about 124mm.