发明名称 COVER OF INGOT GROWER CHAMBER
摘要 PURPOSE: A cover of an ingot grower chamber is provided to achieve a cover adapted for the ingot grower chamber having superior pressure resistance characteristic and to enlarge a viewing angle by forming first and second windows. CONSTITUTION: A cover of an ingot grower chamber includes a cover body(100). The cover body(100) has a dome shape and is divided into an inner cover section(102) and an outer cover section(104), which are coupled to each other while being spaced from each other by a predetermined distance in such a manner that a cooling water flowing path is formed between the inner and outer cover sections(102,104). Cooling water flows through the cooling water flowing path. First and second view ports(108a) are formed by passing through the inner and outer cover sections(102,104). A flow rate varying device is provided at a predetermined portion of the cooling water flowing path so as to vary flow rate of cooling water.
申请公布号 KR20030044573(A) 申请公布日期 2003.06.09
申请号 KR20010075381 申请日期 2001.11.30
申请人 SILTRON INC. 发明人 EOM, IL SU;NA, GWANG HA;PARK, JIN TAEK;SHIN, HYEON GU
分类号 C30B15/10;(IPC1-7):C30B15/10 主分类号 C30B15/10
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