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发明名称
摘要
申请公布号
JP3415272(B2)
申请公布日期
2003.06.09
申请号
JP19940147074
申请日期
1994.06.06
申请人
发明人
分类号
H01L21/22;C23C16/44;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/22
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