SEMICONDUCTOR FABRICATION APPARATUS

摘要

PURPOSE: A semiconductor fabrication apparatus is provided to control effectively a temperature gradient of a predetermined part corresponding to a lift pin in a semiconductor fabrication process by forming a protrusion end on an upper face of a lift pin. CONSTITUTION: A wafer(1) is loaded on an upper portion of a susceptor(130). The susceptor is vertically moved in the inside of a chamber. A plurality of lift pin holes(130a) are formed at the susceptor. A plurality of lift pins(134) are inserted into the plural lift pin holes of the susceptor. The plural lift pin has a protrusion end(134b). A stopper end(134a) is formed at an upper end portion of the lift pin. A stopper(130b) is formed at an upper end portion of the lift pin hole.