发明名称 METHOD FOR FORMING MICRO LENS OF IMAGE SENSOR
摘要 PURPOSE: A method for forming a micro lens of an image sensor is provided to enhance the optical focusability of the image sensor by minimizing a loss of an incident ray in the micro lens. CONSTITUTION: A photoresist layer is coated on a substrate on which a predetermined process is performed. A photoresist pattern(200) is formed on the substrate by performing an exposure process and a developing process for the photoresist layer. A micro lens is formed by performing a thermal process for the photoresist pattern(200). A predetermined groove is formed on a predetermined region of the substrate in the thermal process for the photoresist pattern(200). The micro lens has an asymmetrical structure or a symmetrical structure.
申请公布号 KR20030044331(A) 申请公布日期 2003.06.09
申请号 KR20010075046 申请日期 2001.11.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KO, HO SUN
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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