| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vertical nano circuit comprising a fuse and a resistor, capable of attaining high density. <P>SOLUTION: Vertical nano circuits (100 and 300) are manufactured by such known standard processes as Damascene, wet etching, and reactive etching. So little investment is required other than for acquiring an equipment of latest technology. Thus the vertical nano circuits (100 and 300) are manufactured at a low cost. <P>COPYRIGHT: (C)2003,JPO</p> |
