SINGLE LAYER CAPACITOR AND MANUFACTURING METHOD THEREFOR, AND SINGLE LAYER CAPACITOR ARRAY AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To improve performance characteristic of a single layer capacitive device. SOLUTION: A method for manufacturing the single layer capacitive device allows perfect alignment between capacitive plates. Thus fringe capacitance is eliminated and a uniform fringe border is assured around the device. This fringe border makes handling easy. This fringe border is controlled in a range of about 0.5-about 2.0 mil wide. As a result, superior controllability during a finishing process is acquired, and a higher capacity is brought in a smaller package size. COPYRIGHT: (C)2003,JPO