| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting a spool in a film manufacturing apparatus by which the state of the flange of the spool is reliably and efficiently tested with a simple configuration, and to provide an apparatus for the same. SOLUTION: The flange of the spool 22 is irradiated with inspection light from sensors 358a and 358b arranged at the side parts of engagement parts 352a and 352b while rotating the spool 22 held by the engagement parts 352a and 352b. The state of the flange such as the presence or absence of impairments is inspected by detecting reflected light. COPYRIGHT: (C)2003,JPO
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