| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus capable of reliably and easily confirming the operations in a low-speed operation and high-speed operation of a test waveform creating part for outputting waveforms for test. SOLUTION: The semiconductor testing apparatus which has the test waveform creating part 3 for creating the waveforms for the test to be fed to a semiconductor to be tested 1, is provided with a test log circuit 6 for extracting an internal signal created at a midpoint in a process in which the test waveform creating part 3 creates a final waveform for the test and outputting the internal signal to the outside of the test waveform creating part 3. COPYRIGHT: (C)2003,JPO
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