| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the film thickness of an intermediate layer in a moving multi-layered film. SOLUTION: A film thickness measuring device is provided with a stroboscopic light source 11 emitting stroboscopic light formed with a near infrared area, a bundled two-branch optical fiber 13 carrying reflected light from the multi- layered film with carrying light from the stroboscopic light source 11 to apply it to the moving multi-layered film on the line of the plant, a spectroscope 16 decomposing the reflected light obtained from this bundled two-branch optical fiber 13, a multi-channel detector 17 converting the reflected light decomposed into a spectrum with the spectroscope 16 into an electric signal, and a signal processing part 20 displaying as a membrane thickness profile by processing the electric signal obtained by the multi-channel detector 17. COPYRIGHT: (C)2003,JPO
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