摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus capable of aligning the other piece of work while machining a piece of work and also capable of not only improving the availability factor of an expensive alignment means but also improving the availability factor of the apparatus as a whole, while minimizing a rise in cost of the apparatus. SOLUTION: This dicing apparatus is provided with a plurality of work tables 23 that mount works W and constituted so as to be able to move in the X direction independently from each other and a microscope 80 to observe the work W constituted so as to be able to move to a position over each work table 23 by means of a microscope driving means 70, so that it is possible to perform alignment of the other piece of work W while machining a piece of work W. By this construction, it is possible to improve the availability factor of both the expensive alignment means and the entire dicing apparatus. COPYRIGHT: (C)2003,JPO |