发明名称 DICING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a dicing apparatus capable of aligning the other piece of work while machining a piece of work and also capable of not only improving the availability factor of an expensive alignment means but also improving the availability factor of the apparatus as a whole, while minimizing a rise in cost of the apparatus. SOLUTION: This dicing apparatus is provided with a plurality of work tables 23 that mount works W and constituted so as to be able to move in the X direction independently from each other and a microscope 80 to observe the work W constituted so as to be able to move to a position over each work table 23 by means of a microscope driving means 70, so that it is possible to perform alignment of the other piece of work W while machining a piece of work W. By this construction, it is possible to improve the availability factor of both the expensive alignment means and the entire dicing apparatus. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003163178(A) 申请公布日期 2003.06.06
申请号 JP20010362501 申请日期 2001.11.28
申请人 TOKYO SEIMITSU CO LTD 发明人 SAKATANI YASUYUKI;FUKUOKA KAZUYA;HIRUTA TOMOAKI;ASANO TAKAYUKI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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