| 摘要 |
PROBLEM TO BE SOLVED: To observe a minute shape of a micron scale by a simple and inexpensive optical system without using expensive equipment such as a SPM and a differential interference microscope, etc., and without having a complicated constitution using optical components. SOLUTION: With a white light from a light source, a mirror disposed outside an objective lens of the optical system is illuminated. A reflected light enters into the optical system. A contrast enhanced image of shapes of minute recesses and protrusions similar to the image observed by the differential interference microscope, can be obtained. COPYRIGHT: (C)2003,JPO
|
