| 摘要 |
PROBLEM TO BE SOLVED: To reduce production costs by improving yields and achieve miniaturization of the device. SOLUTION: Light flux is applied from a surface emission light source 20 to a scale 10 in which a predetermined reference grating 12 is formed. A light receiving module 30 is disposed close to the light source 20 between the light source 20 and the scale 10. The light receiving module 30 has light receiving arrays 30A, 30B, which act also as light emitting side gratings for partially shielding the light flux from the light source 20. COPYRIGHT: (C)2003,JPO
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