| 摘要 |
PROBLEM TO BE SOLVED: To provide a work conveying apparatus capable of suctioning and retaining a diced work in a lump, cleaning the work while being suctioned and retained, and conveying it to the next process. SOLUTION: This work conveying apparatus is provided with a suction head 14 that conveys a work 2 in a lump, which has been diced into pieces while, being suctioned to a dicing jig 5 and one of surfaces has been cleaned, a work cleaning means 24 that cleans the other surfaces of the work 2 while being suctioned to and retained by the suction head 14, and a buffer section 44 that delivers the cleaned work 2 in a lump. COPYRIGHT: (C)2003,JPO |
